功能

• This piezo stage uses a digital sensor to achieve high precision, high rigidity, and high speed, while achieving a theoretical resolution of 1 nm.
• An ultra-high precision positioning transmission XY stage with an opening of 50×50 mm, equipped with a piezo element in the actuator and a digital sensor in the position feedback, suitable for fine movement of a sample under a microscope.
• It can be driven by the Sigma Fine Stage controller FINE-503.
• Since the controller supports RS232C, GP-IB (FINE-503 only), and USB interface, you can easily control the position by using SGEMCS, SGTERM, and SGSFSX measurement and control software from a PC.
• Ideal for use in various microscopes, precision measurement, semiconductor inspection equipment, high-precision mask positioning, scanning interferometers, image processing equipment, bio-related equipment, etc.
• * The movement amount at the time of closing is about 20% of that at the time of opening.