产品详细内容
产品型号: 69-3849-30
产品品牌: INFICON
功能
- Standard sensor for quartz film thickness meter
- Can be used with film thickness monitor STM-2
- Separate sensor, sensor feed-through, and crystal vibrator are required.
- Ultra-Torr specification allows variable sensor length
- water cooling required
规格
- Sensor Feedthrough Connection: Ultra-Torr
- Sensor Length Adjustment Range: 20.3~71 cm
- Crystal Vibrator Size: Diameter 14 mm
- Quartz Vibrator Measurement Start Frequency: 6 MHz
- Number of sensors installed: 1
- Water cooling: water temperature 30°C or less, flow rate 150~200 sccm
- Size: 27 x 62 x 18 mm
- Product Warranty: 1 year from date of shipment
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