产品详细内容
产品型号: 61-9948-16
产品品牌: KOJIMA INSTRUMENTS INC.
功能
- Compact handy mass flow control unit with built-in mass flow controller and lead-out unit.
- Touch panel type allows easy operation such as full scale setting, flow rate setting, valve opening and closing.
- If requested, it can be made for fluids other than AIR (N2, H2, He, Ar, O2, CO2, and other gases). Please consult me.
规格
- 感测器:温度感测器
- 流体:空气 (*其他N2,H2, He, Ar,O2,符合CO2和各种其他气体。如有任何问题,请与 联络。)
- 全尺寸:10 sccm/min (20°C 1 atm体积流量显示) (*0°C可校准) 。如有任何问题,请与 联络。)
- 阀门方法:比例电磁阀 (关闭时关闭)
- 控制/测量范围:2~100%F.S
- 流速准确度:±1.0%F.S. (25°C)
- 耐压:980KPA (G)
- 气体接触单元材料:不锈钢 (SUS316) 、FKM
- 连接埠大小:1/4世伟洛克 (*如需其他弯管头,请洽询 ) 。)
- 电源:AC 85-264V 48-440Hz
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