日本Kashiyama樫山工业干式真空泵SDX1200/SDT1200 日本Kashiyama樫山工业干式真空泵SDX1200/SDT1200  Series   SD Series   Features Inheritance and Evolution of Process Durability Major Products Model*1 SDX600 SDT600 SDX1200 SDT1200 SDX1800 SDT1800 SDH3000*5 SDH6000*5 Max. pumping speed [L/min]*2 10,000 18,000 19,000 30,000 50,000 100,000 Ultimate pressure [Pa] *2 0.5 0.3 0.5 N2 purge[SLM] 0～80 0～120 Cooling water[L/min] 3.0 4.0 3.0 4.0 3.0 4.0 4.0 4.0 Power consumption[kW]*3 1.5 3.0 1.65 3.15 2.1 3.3 3.3 3.7 Dimensions [mm]*4 L 695 695 850 910 1050 W 285 285 380 420 515 H 850 850 950 900 950 *1) SDX: Energy-saving, harsh process-compatible; SDT/SDH: Super harsh and process durable *2) Approximate data while no nitrogen purge 　*3) Approximate data while ultimate pressure　*4) Package dimension *5) Please contact our sales representative for more information regarding the product lineup for even greater process robustness. Specifications and model names are subject to change without prior notice. (For information regarding compatible gases, please inquire with us.) S-P Curve * S-P curves vary by combination.