功能

• This stage combines the ball guide XY axis stage and the flat Z axis stage.
• * Due to the structure of the Z-axis, the springs in the stage may not be able to withstand the load and may stretch out, so it is not possible to install and use the Z-axis in the reverse direction.
• * Since the Z-axis is constructed by applying the principle of leverage, the feed amount relative to the scale is shifted (about ±0.02 mm for 0.5 mm/1 rotation of the micrometer head) depending on the position of the moving amount.