功能

• Long life chemical type
• Chemical type vacuum pump using corrosion and wear resistant materials for gas contact parts.
• Special surface treatment is applied to the pump casing and main structural components.
• The O-ring and other chemical components are fluorine-based, and the other components are made of corrosion-resistant materials.
• The KF-25 quick-coupling flange (ISO type) is used for the exhaust port, making it easy to attach and detach to the connection piping necessary for exhaust containing harmful gases.
• The KF-25 Quick Coupling Flange can also be attached to the inlet (optional).